Optimal Design of Capacitive Micro Cantilever Beam Accelerometer
نویسندگان
چکیده
منابع مشابه
MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam
Sensors & Transducers Journal (ISSN 1726-5479) is a peer review international journal published monthly online by International Frequency Sensor Association (IFSA). Available in electronic and CD-ROM. Abstract: Thermometry is an interested field in physics and metrology. In this paper, a capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed. The gov...
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ژورنال
عنوان ژورنال: Modern Applied Science
سال: 2009
ISSN: 1913-1852,1913-1844
DOI: 10.5539/mas.v3n9p16